| 000 | 00374nam a2200133Ia 4500 | ||
|---|---|---|---|
| 008 | 170101s2001 xx 000 0 und d | ||
| 020 | _a9780195681444 | ||
| 100 | _aCampbell Stephen A | ||
| 245 | 0 | _aScience And Engineering Of Microelectronic Fabrication | |
| 260 |
_aNew Delhi _bOxford University Press _c2001 |
||
| 300 | _a603 | ||
| 650 | _aMechanical | ||
| 942 |
_2ddc _cBK |
||
| 999 |
_c441243 _d441243 |
||