| 000 | 00384nam a22001577a 4500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 020 | _a9788132206637 | ||
| 100 | _aAdamas Thomas M | ||
| 245 | _aIntroductory MEMS Fabrication And Application | ||
| 250 | _a1 | ||
| 260 |
_aNew Delhi _bSpringer _c2014 |
||
| 300 | _a444 | ||
| 440 | _aIntroductory MEMS Fabrication And Application | ||
| 650 | _aMEMS | ||
| 942 |
_2ddc _cBK |
||
| 999 |
_c824404 _d824404 |
||