| 000 | 00365nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 170101s2001 xx 000 0 und d | ||
| 020 | _a0131911368 | ||
| 100 | _aXiao Hong | ||
| 245 | 0 | _aSemiconductor Manufactring Technology | |
| 260 |
_aNew Jersey _bPrentice Hall _c2001 |
||
| 300 | _a647 | ||
| 650 | _aManufactring | ||
| 650 | _aMechanical | ||
| 942 |
_2ddc _cBK |
||
| 999 |
_c228343 _d228343 |
||