000 00339nam a2200145Ia 4500
008 170101s1987 xx 000 0 und d
020 _a0071002820
100 _aScot,Ruska W.
245 0 _aMicroelectronic Processing
260 _aSingpore
_bMGH
_c1987
300 _a430
650 _aElectronics
650 _a-ronic
942 _2ddc
_cBK
999 _c40243
_d40243