000 00360nam a2200145Ia 4500
008 170101s2010 xx 000 0 und d
020 _a9788126525805
100 _aRebeiz Gabriel M
245 0 _aRF MEMS Theory Deisgn And Technology
260 _aNew Delhi
_bWiley
_c2010
300 _a483
650 _aMechanical
650 _aMEMS
942 _2ddc
_cBK
_01
999 _c417943
_d417943